Mask frame assembly for thin film deposition
US9780305B2 · kind B2 · utility
7Cited by
0References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 19, 2014 |
| Grant date | Oct 3, 2017 |
| Priority date | — |
| Expiry date | Mar 9, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/166
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Provided is a mask frame assembly for thin film deposition. The mask frame assembly includes a mask frame having an opening surrounded by the mask frame; and a support extending across the opening to support a mask on the mask frame. The support includes a support body, a plurality of ribs in the support body, and one or more patterned portions in spaces between the plurality of ribs, the one or more patterned portions having a different thickness than the ribs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.