Patent · US Active

Method for producing a component

US9783410B2 · kind B2 · utility

0Cited by

11References

6Claims

0Family size

Assignee

NORTHROP GRUMMAN LITEF GMBH · DE

Inventors

Wolfram Geiger · Gomaringen, DE
Uwe Breng · Gundelfingen, DE
Martin Hafen · Rustenhart, FR
Guenter Spahlinger · Stuttgart, DE

Key dates

Filing date	Feb 11, 2015
Grant date	Oct 10, 2017
Priority date	—
Expiry date	Feb 11, 2035

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C1/00333
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

In a method for producing a component, a first layer composite is first produced, comprising a structured layer and a trench filled with an insulating material. The structured layer is electrically conductive at least in a first region. The trench filled with an insulating material extends outwards from a first surface of the structured layer and is arranged in the first region of the structured layer. The first surface of the structured layer faces a first surface of the first layer composite. The method additionally has the step of producing a second layer composite, which has a first depression in a first surface of the second layer composite, and the step of connecting the first layer composite to the second layer composite. The first surface of the first layer composite adjoins the first surface of the second layer composite at least in some regions, said filled trench being arranged within the lateral position of the first depression. After the first layer composite has been connected to the second layer composite, the thickness of the first layer composite from a second surface of the first layer composite to the depth of the filled trench is reduced. The second surface of t…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.