Sensing of mirror position using fringing fields
US9784558B2 · kind B2 · utility
1Cited by
3References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 4, 2015 |
| Grant date | Oct 10, 2017 |
| Priority date | — |
| Expiry date | Sep 25, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/085
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Mechanical apparatus includes a base and a moving element, which is mounted to rotate about an axis relative to the base. A capacitive rotation sensor includes at least one first electrode disposed on the moving element in a location adjacent to the base and at least one second electrode disposed on the base in proximity to the at least one first electrode. A sensing circuit is coupled to sense a variable capacitance between the first and second electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.