Patent · US Active

Tightness test during the evacuation of a film chamber

US9784639B2 · kind B2 · utility

3Cited by

5References

12Claims

0Family size

Assignee

INFICON AG · LI

Inventors

Daniel Wetzig · Cologne, DE
Silvio Decker · Cologne, DE

Key dates

Filing date	Aug 18, 2014
Grant date	Oct 10, 2017
Priority date	—
Expiry date	Oct 4, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG01M3/3281
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method for testing the sealing tightness of a specimen, containing a gas, in a film chamber made from flexible material. The film chamber is evacuated by a vacuum pump and the gas flow flowing out of the film chamber and generated by the vacuum pump is measured during the evacuation and is examined with respect to a possible leak of the specimen.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.