Apparatus for uniformly irradiating and imaging an article
US9784688B2 · kind B2 · utility
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13Claims
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Key dates
| Filing date | Oct 4, 2013 |
| Grant date | Oct 10, 2017 |
| Priority date | — |
| Expiry date | May 16, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0636
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided herein is an apparatus, including a reflective surface configured to reflect photons onto a surface of an article, a stage configured to support the article, and an assembly. The assembly is configured to radiate photons through the article to the reflective surface. The assembly is further configured to image the article with irradiance of the photons.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.