Patent · US Active

Apparatus for uniformly irradiating and imaging an article

US9784688B2 · kind B2 · utility

0Cited by
10References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 4, 2013
Grant dateOct 10, 2017
Priority date
Expiry dateMay 16, 2035

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2201/0636
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Provided herein is an apparatus, including a reflective surface configured to reflect photons onto a surface of an article, a stage configured to support the article, and an assembly. The assembly is configured to radiate photons through the article to the reflective surface. The assembly is further configured to image the article with irradiance of the photons.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.