Thermally insensitive open-loop hung mass accelerometer with differential Eddy current sensing
US9784759B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 16, 2015 |
| Grant date | Oct 10, 2017 |
| Priority date | — |
| Expiry date | Mar 30, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A thermally insensitive open-loop hung mass accelerometer utilizes a transverse geometry to attach the body/flexures/proof mass so that thermal expansion effects due to thermal gradients across the accelerometer or bulk temperatures changes of one flexure relative to the other cause minimal or no axial displacement of the proof mass. In this geometry, multiple flexures may be stacked to achieve the required stiffness, thus reducing manufacturing costs and any tolerancing issues, without affecting thermal sensitivity. The accelerometer is suitably designed to exhibit a radial symmetry. The accelerometer is suitably designed to use low CTE materials for at least the proof mass and body and a low thermal expansion differential Eddy current sensor head.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.