Electric field sensor, system, and method for programming electronic devices on a wafer
US9784787B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 10, 2015 |
| Grant date | Oct 10, 2017 |
| Priority date | — |
| Expiry date | Jan 8, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/318511
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electric field sensor includes sense and reference cells. The sense cell produces a resistance that varies relative to an intensity of an electric field, and the reference cell produces a resistance that is invariable relative to the intensity of the electric field. An output signal indicative of the intensity of the electric field is determined using the difference between the resistances. A system includes an electric field source that outputs a digital test program as an electric field signal. The system further includes the electric field sensor formed with IC dies on a wafer. The electric field sensor receives the electric field signal. The received electric field signal is converted to the test program, and the test program is stored in memory on the wafer. The electric field source does not physically contact the dies, but can flood an entire surface of the wafer with the electric field signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.