Patent · US Active

Micro-structured atomic source system

US9788407B2 · kind B2 · utility

0Cited by
3References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 24, 2017
Grant dateOct 10, 2017
Priority date
Expiry dateJan 24, 2037

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB81C2201/0133
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

A micro-structured atomic source system is described herein. One system includes a silicon substrate, a dielectric diaphragm, wherein the dielectric diaphragm includes a heater configured to heat an atomic source substance, an intermediary material comprising a chamber configured to receive the atomic source substance, and a guide material configured to direct a flux of atoms from the atomic source substance.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.