Method and device for measuring a vacuum pressure using a measuring cell arrangement
US9791339B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 20, 2013 |
| Grant date | Oct 17, 2017 |
| Priority date | — |
| Expiry date | Apr 3, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L21/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Arrangement with capacitive pressure-measuring cell has a diaphragm for measuring vacuum pressure and a printed circuit board acting as a temperature sensor and another electronic component designed as a microchip that contains a digital signal processor with a temperature-to-digital converter and a capacitance-to-digital converter using a time measuring method. The converters determine temperature and capacitance of the cell in comparison to a reference resistor for temperature arranged on the printed circuit board and reference capacitor for capacitance for the pressure to be measured dependent on deformation of the diaphragm. A temperature-corrected pressure signal derived from the two measured signals uses correlation, the measured signals having been determined in advance from a calibration process, and the temperature-corrected pressure signal is provided as a pressure signal at the signal output for further processing. In this manner there is quick pressure measurement with high measuring accuracy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.