Inspection system and method for controlling the same
US9791387B2 · kind B2 · utility
1Cited by
5References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 26, 2014 |
| Grant date | Oct 17, 2017 |
| Priority date | — |
| Expiry date | Dec 4, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01T7/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection system includes an irradiation source, an image detector, and a placement device. The placement device comprises a carrier and a rotation mechanism. With respect to connections, the placement device is configured to be disposed between the irradiation source and the image detector, and the rotation mechanism is configured to be connected to the carrier. With respect to operations, the irradiation source and the image detector are driven to be moved along a predetermined path, the carrier is configured to carry at least one object, and the rotation mechanism is configured to rotate the carrier.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.