Patent · US Active

Photo-acoustic device and method for non-contact measurement of thin layers

US9791419B2 · kind B2 · utility

2Cited by

6References

18Claims

0Family size

Assignee

Novelis Inc. · US

Inventors

Heinrich Prinzhorn · Göttingen, DE
Stefan Erdmann · Atlanta, US
Thomas Wuttke · Renshausen, DE
Andreas Bauer · Obernburg, DE
Bernd Abel · Dransfeld, DE
Ales Charvat · Oebisfelde, DE

Key dates

Filing date	Feb 16, 2015
Grant date	Oct 17, 2017
Priority date	—
Expiry date	Sep 12, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG01N2291/103
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A measuring device for non-mechanical-contact measurement of a layer, the measuring device including a light source operative to generate a pulse adapted to interact with the layer so as to generate a thermal wave in a gas medium present adjacent the layer. The thermal wave causes an acoustic signal to be generated. The measuring device further includes a detector adapted to detect a first signal responsive to the acoustic signal, the detector not being in mechanical contact with the layer. The first signal is representative of the measured layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.