Micropositioning device with multidegrees of freedom for piezoelectric actuators and associated method
US9791491B2 · kind B2 · utility
2Cited by
3References
10Claims
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Key dates
| Filing date | Mar 22, 2013 |
| Grant date | Oct 17, 2017 |
| Priority date | — |
| Expiry date | Jul 4, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/2027
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micropositioning device for a piezoelectric actuator includes a means for controlling an electric field applied to the piezoelectric actuator so as to deform the piezoelectric material, and means for simultaneous measurement of a variation of electric charge accumulated on the piezoelectric actuator resulting from the deformation; and means for acquiring measurements of the variation of electric charge, for processing these acquisitions and for estimating a displacement (x, y, z) of the piezoelectric actuator and/or an applied force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.