Patent · US Active

Magnetically drivable micromirror

US9791663B2 · kind B2 · utility

1Cited by

3References

7Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Stefan Pinter · Reutlingen, DE
Heribert Weber · Leverkusen, DE
Frank Fischer · Pfaffen-Schwabenheim, DE
Michael Krueger · Littleton, US
Joerg Muchow · Reutlingen, DE
Christoph Friese · Reutlingen, DE

Key dates

Filing date	Nov 9, 2011
Grant date	Oct 17, 2017
Priority date	—
Expiry date	Jan 22, 2033

Classification

Technology area (CPC G)Physics
CPC primaryG02B26/12
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A magnetically drivable micromirror having an outer frame, a coil former, and torsion springs, situated in a first plane, the torsion springs having an axis of rotation, and the coil former being connected to the outer frame by the torsion springs so as to be capable of rotational motion about the axis of rotation, having a mirror element that is situated in a second plane parallel to the first plane, the mirror element being connected to the coil former by an intermediate layer. A 2D scanner having a first magnetically drivable micromirror and a second drivable mirror, and to a method for producing a micromirror are also described.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.