Patent · US Active

Mirror array

US9791691B2 · kind B2 · utility

2Cited by

3References

23Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Severin Waldis · Aalen, DE
Sebastian Lani · Murten, CH
Benedikt Knauf · Aalen, DE
Jian Deng · Brooklyn, US
Roger Marc Bostock · Münsingen, CH

Key dates

Filing date	Sep 19, 2013
Grant date	Oct 17, 2017
Priority date	—
Expiry date	Apr 1, 2035

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49117
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A mirror array having a total surface extending perpendicularly to a surface normal, comprises a multiplicity of mirror elements each having a reflection surface and at least one degree of freedom of displacement, wherein the totality of the mirror elements form a parqueting of a total reflection surface of the mirror array, and wherein the mirror array is embodied modularly as a tile element in such a way that the parqueting of the total reflection surface can be extended by a tiling of a plurality of such mirror arrays.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.