Hybrid electronic device protected against humidity and method of protecting a hybrid electronic device against humidity
US9793141B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jan 30, 2017 |
| Grant date | Oct 17, 2017 |
| Priority date | — |
| Expiry date | Jan 30, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2225/06513
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
This method concerns the protection against humidity of a device including a first and a second electronic components respectively having two opposite surfaces, the surfaces: being separated by a non-zero distance shorter than 10 micrometers; having an area greater than 100 mm2; being connected by an assembly of electrical interconnection elements spaced apart from one another by a space void of matter. This method includes applying a deposit of thin atomic layers onto the device to form a layer of mineral material covering at least the interconnection elements, the layer of mineral material having a permeability to water vapor smaller than or equal to 10−3 g/m2/day.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.