Patent · US Active

Use of vacuum chucks to hold a wafer or wafer sub-stack

US9793152B2 · kind B2 · utility

2Cited by

2References

20Claims

0Family size

Assignee

Heptagon Micro Optics Pte. Ltd. · SG

Inventors

Hartmut Rudmann · Jona, CH
Stephan Heimgartner · Passugg, CH
John A. Vidallon · Singapore, SG

Key dates

Filing date	Jun 28, 2013
Grant date	Oct 17, 2017
Priority date	—
Expiry date	Oct 2, 2034

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB32B2551/00
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

Techniques are described for holding a wafer or wafer sub-stack to facilitate further processing of the wafer of sub-stack. In some implementations, a wafer or wafer sub-stack is held by a vacuum chuck in a manner that can help reduce bending of the wafer or wafer sub-stack.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.