Precise annealing of focal plane arrays for optical detection
US9793177B2 · kind B2 · utility
1Cited by
11References
14Claims
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Key dates
| Filing date | Aug 12, 2015 |
| Grant date | Oct 17, 2017 |
| Priority date | — |
| Expiry date | Aug 12, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Precise annealing of identified defective regions of a Focal Plane Array (“FPA”) (e.g., exclusive of non-defective regions of the FPA) facilitates removal of defects from an FPA that has been hybridized and/or packaged with readout electronics. Radiation is optionally applied under operating conditions, such as under cryogenic temperatures, such that performance of an FPA can be evaluated before, during, and after annealing without requiring thermal cycling.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.