Apparatus for separating substrate and method of separating substrate by using the same
US9793518B2 · kind B2 · utility
1Cited by
5References
20Claims
0Family size
Assignee
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Key dates
| Filing date | Apr 1, 2016 |
| Grant date | Oct 17, 2017 |
| Priority date | — |
| Expiry date | Apr 1, 2036 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/1978
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus for separating a substrate and a method of separating a substrate by using the same are disclosed. In one aspect, the apparatus includes a stage and an adsorber facing the stage and comprising a plurality of vacuum pad portions. An upper surface of the stage includes a first region and a pair of second regions located on opposing sides of the first region, wherein the first region and the second regions are disposed on different planes, and wherein each of the second regions is inclined with respect to the first region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.