Patent · US Active

Uniform fluid manifold for acoustic transducer

US9796000B2 · kind B2 · utility

2Cited by

2References

9Claims

0Family size

Assignee

Product Systems Incorporated · US

Inventors

Mark J. Beck · Los Gatos, US
Eric G. Liebscher · San Jose, US

Key dates

Filing date	Jun 28, 2012
Grant date	Oct 24, 2017
Priority date	—
Expiry date	Aug 3, 2035

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67051
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

A fluid manifold comprised of a manifold adapted to deliver fluid directly into a gap formed between a surface of a substrate and an acoustic transducer. The fluid is delivered into the gap at a variable rate along a length of the manifold. Preferably, the manifold includes a plurality of apertures positioned along the length of the manifold for dispensing the fluid into the gap at the variable rate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.