Contour probe linkage for a horizontal beam optical comparator
US9797713B2 · kind B2 · utility
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7Claims
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Key dates
| Filing date | Sep 25, 2015 |
| Grant date | Oct 24, 2017 |
| Priority date | — |
| Expiry date | Sep 27, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/03
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure describes an improved horizontal beam optical comparator that includes a probe to follow the surface of a work-piece, moreover, providing a method for gathering changes in height and depth to measure, plot and delineate surface contours of work-pieces relative to a movable “X” axis stage, and depth along a moveable “Y” axis stage without presence in the objective lenses depth of field.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.