Patent · US Active

Test object for measuring the point spread function of an optical system

US9797805B2 · kind B2 · utility

0Cited by

1References

16Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Lars Stoppe · Jena, DE
Robert Pomraenke · Jena, DE
Michael Arnz · Oberkochen, DE

Key dates

Filing date	May 8, 2015
Grant date	Oct 24, 2017
Priority date	—
Expiry date	Sep 28, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/706
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A test object for measuring the point spread function (PSF) of an optical system having a given Airy diameter (dAiry) comprises a structure to be imaged having a plurality of structure elements to be imaged, wherein the structure elements are embodied and arranged in such a way that the structure has at least two axes of symmetry.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.