Hybrid MEMS scanning module
US9798135B2 · kind B2 · utility
17Cited by
20References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 16, 2015 |
| Grant date | Oct 24, 2017 |
| Priority date | — |
| Expiry date | Jun 26, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/105
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A scanning device includes a base containing one or more rotational bearings disposed along a gimbal axis. A gimbal includes a shaft that fits into the rotational bearings so that the gimbal rotates about the gimbal axis relative to the base. A mirror assembly includes a semiconductor substrate, which has been etched and coated to define a support, which is fixed to the gimbal, at least one mirror, contained within the support, and a connecting member connecting the at least one mirror to the support and defining at least one mirror axis, about which the at least one mirror rotates relative to the support.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.