Temperature controller for semiconductor wafer and temperature control method for semiconductor wafer
US9798308B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 9, 2015 |
| Grant date | Oct 24, 2017 |
| Priority date | — |
| Expiry date | Apr 9, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67248
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A temperature controller that performs a temperature control on a plurality of temperature adjusters including a reference temperature adjuster to adjust a temperature of a semiconductor wafer includes a setpoint setting section that: sets a temperature detected by a master temperature detector as a control setpoint for a reference one of the temperature adjusters of a master loop, until a temporary setpoint below an actual control setpoint preset as a desired temperature of the semiconductor wafer is reached; and sets the actual control setpoint as the control setpoint for the master loop after the temporary setpoint is reached.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.