Fuse elements and methods for forming the same
US9799601B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 6, 2017 |
| Grant date | Oct 24, 2017 |
| Priority date | — |
| Expiry date | Feb 6, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L23/53257
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A fuse element includes a metal layer disposed on a substrate. The metal layer includes an intermediate segment, a first block and a second block. The first block and the second block are electrically connected to two respective ends of the intermediate segment. The fuse element also includes a dielectric layer covering the intermediate segment, the first block and the second block, a first passivation layer disposed on the dielectric layer, and a second passivation layer disposed on the first passivation layer. The fuse element further includes an opening penetrating through the first passivation layer, the second passivation layer and a portion of the dielectric layer, and located above the intermediate segment. In addition, a protective film is disposed on a bottom and a portion of a sidewall of the opening, and covers the first passivation layer exposed by the opening.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.