Transporting device, processing arrangement and coating method

US9802763B2 · kind B2 · utility

Assignee

• VON ARDENNE GMBH · DE

Inventors

• Michael Hentschel · Dresden, DE
• Hubertus Von Der Waydbrink · Dresden, DE
• Daniel Stange · Dresden, DE
• Christoph Dubau · Kamenz - Kamjenc, DE
• Reinhard Jaeger · Coswig, DE

Key dates

• Filing date: Jun 22, 2015
• Grant date: Oct 31, 2017
• Expiry date: Oct 1, 2035

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C16/4581
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

In various embodiments, a transporting device for transporting a substrate in a process chamber is provided. The transporting device includes a guiding rail arrangement having two guiding rails for mounting a multiplicity of bars between the two guiding rails. The two guiding rails form a closed path of movement along which the multiplicity of bars are guided. The transporting device further includes the multiplicity of bars that are mounted in the guiding rail arrangement, and a drive device for pushing at least one bar of the multiplicity of bars in such a way that, in a transporting region of the guiding rail arrangement, in each case multiple bars of the multiplicity of bars are pushed against one another and the bars that have been pushed against one another move along the path of movement in the transporting region.