Apparatus and method for manufacturing display apparatus
US9803279B2 · kind B2 · utility
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14Claims
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Key dates
| Filing date | Apr 2, 2015 |
| Grant date | Oct 31, 2017 |
| Priority date | — |
| Expiry date | Aug 6, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/166
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus for manufacturing a display apparatus includes a stage supporting a substrate, a deposition gas supplying unit above the substrate, the deposition gas supplying unit spraying a deposition gas onto the substrate, and a first mask between the stage and the deposition gas supplying unit, the first mask including at least two first openings through which the deposition gas selectively passes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.