Systems and methods for a time-based optical pickoff for MEMS sensors
US9803979B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 21, 2015 |
| Grant date | Oct 31, 2017 |
| Priority date | — |
| Expiry date | Oct 22, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0822
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods for a time-based optical pickoff for MEMS sensors are provided. In one embodiment, a method for an integrated waveguide time-based optical-pickoff sensor comprises: launching a light beam generated by a light source into an integrated waveguide optical-pickoff monolithically fabricated within a first substrate, the integrated waveguide optical-pickoff including an optical input port, a coupling port, and an optical output port; and detecting changes in an area of overlap between the coupling port and a moving sensor component separated from the coupling port by a gap by measuring an attenuation of the light beam at the optical output port, wherein the moving sensor component is moving in-plane with respect a surface of the first substrate comprising the coupling port and the coupling port is positioned to detect movement of an edge of the moving sensor component.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.