Device and method for sensor calibration
US9804007B2 · kind B2 · utility
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26Claims
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Key dates
| Filing date | Dec 19, 2014 |
| Grant date | Oct 31, 2017 |
| Priority date | — |
| Expiry date | Jul 1, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C99/003
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A device and method for a MEMS device with at least one sensor is disclosed. A thermal element is disposed adjacent the MEMS device to selectively adjust a temperature of the MEMS device. A calibration operation is initiated for the sensor to determine a correction value to be applied to the sensor measurement based on the temperature. The correction value is stored.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.