Hemispherical scanning optical scatterometer
US9804087B2 · kind B2 · utility
1Cited by
4References
20Claims
0Family size
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Key dates
| Filing date | May 30, 2014 |
| Grant date | Oct 31, 2017 |
| Priority date | — |
| Expiry date | Jul 31, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/4723
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A hemispherical scanning optical scatterometer and method for its use for measuring scattered radiation, with a reflected scatter measurement laser, and/or a transmitted scatter measurement laser, an array of optical detectors, a computer controlled system to rotate the array of optical detectors, an electronic system, a computer interface and a computer for processing the signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.