Reducing extrinsic stress in thin film optical mirrors and filters for deep ultraviolet
US9804309B1 · kind B1 · utility
1Cited by
3References
19Claims
0Family size
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Key dates
| Filing date | Apr 22, 2015 |
| Grant date | Oct 31, 2017 |
| Priority date | — |
| Expiry date | Sep 1, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/285
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A multilayer coating has a substrate, an optical layer, and a buffer layer between the substrate and the optical layer. The buffer layer has a coefficient of thermal expansion between that of the substrate and the optical layer. The multilayer coating has properties that enable its use in deep ultraviolet (DUV) wavelengths, such as for a multilayer mirror or edge filter. This multilayer coating with a buffer layer provides improved thermal stability and lifetime.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.