Patent · US Active

Optical component

US9804501B2 · kind B2 · utility

1Cited by

3References

20Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Severin Waldis · Aalen, DE
Marco Jassmann · Neresheim, DE
Caglar Ataman · Freiburg (Elbe), DE
Roger Marc Bostock · Münsingen, CH
Jian Deng · Brooklyn, US
Sebastian Lani · Murten, CH
Benedikt Knauf · Aalen, DE

Key dates

Filing date	Jul 17, 2014
Grant date	Oct 31, 2017
Priority date	—
Expiry date	Sep 29, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/7085
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An optical component comprising a mirror array having a multiplicity of mirror elements, which each have at least one degree of freedom of displacement, and which are each connected to at least one actuator for displacement, has a multiplicity of local regulating devices for damping oscillations of the mirror elements, wherein each of the regulating devices in each case has at least one capacitive sensor having at least one moveable electrode and at least one electrode arranged rigidly relative to the carrying structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.