Method and device for testing semiconductor manufacturing equipment automation program
US9804953B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Sep 29, 2015 |
| Grant date | Oct 31, 2017 |
| Priority date | — |
| Expiry date | Sep 29, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method for testing an equipment automation program may be implemented using a hardware device and may include the following steps: receiving user input through a user interface of the device; automatically identifying a test scenario based on the user input; automatically and sequentially fetching a plurality of messages according to the test scenario; and automatically and sequentially sending the messages to the equipment automation program.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.