Patent · US Active

Plasma source

US9805918B2 · kind B2 · utility

0Cited by
4References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 6, 2013
Grant dateOct 31, 2017
Priority date
Expiry dateFeb 6, 2033

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH05H1/466
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

The invention relates to a plasma source (1) for depositing a coating onto a substrate (9), which is connectable to a power source (P) and includes: an electrode (2); a magnetic assembly (4) located circumferentially relative to said electrode and including a set of magnets mutually connected by a magnetic bracket (46) including a first and second central magnet (43, 44) and at least one head magnet (45); and an electrically insulating enclosure (5) arranged such as to surround the electrode and the magnets.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.