Compositionally graded photodetectors
US9806125B2 · kind B2 · utility
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23References
22Claims
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Key dates
| Filing date | Jul 20, 2016 |
| Grant date | Oct 31, 2017 |
| Priority date | — |
| Expiry date | Jul 20, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F77/1237
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An ultraviolet photodetector for a sensor device includes a film deposited on a substrate. The film includes a compositionally graded magnesium-zinc oxide having a ratio of magnesium-to-zinc that decreases between a portion of the film adjacent to the substrate and a portion of the film opposite the substrate for shifting the peak absorption of the film toward the visible wavelengths of the electromagnetic spectrum.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.