Laser system and method thereof
US9808888B2 · kind B2 · utility
0Cited by
4References
20Claims
0Family size
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Key dates
| Filing date | Aug 5, 2014 |
| Grant date | Nov 7, 2017 |
| Priority date | — |
| Expiry date | Sep 22, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/105
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A laser system includes a laser configured to emit pulse bursts and a motion device in optical communication with the laser. The motion device moves a laser beam along a process path on a substrate and is configured to have a natural frequency that is greater than an operating frequency of the laser system. The laser system enables high and constant speed processing along tight radii in the process path, which is useful to form laser induced channels along the process path with equal spacing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.