Electromechanical system structures with ribs having gaps
US9809445B2 · kind B2 · utility
0Cited by
9References
15Claims
0Family size
Assignee
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Key dates
| Filing date | Aug 22, 2012 |
| Grant date | Nov 7, 2017 |
| Priority date | — |
| Expiry date | May 2, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G2300/08
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
This disclosure provides systems, methods and apparatus for an electromechanical systems (EMS) assembly. The EMS assembly includes a substrate, an anchor disposed on the substrate, and a suspended planar body supported over the substrate by the anchor. The suspended planar body includes at least one depression extending out of a plane of the suspended planar body and protruding towards the substrate. The suspended planar body also includes a substantially horizontal portion corresponding to a gap in the at least one depression. An extent of the gap is up to 20% of a length of the suspended planar body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.