Thermal flow meter with temperature detection element positioned on protrusion of circuit package
US9810560B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 15, 2013 |
| Grant date | Nov 7, 2017 |
| Priority date | — |
| Expiry date | Dec 31, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F15/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In order to provide a thermal flow meter for improving workability of a flow rate measurement device having a temperature measurement function for the measurement target gas and measurement accuracy for measuring a temperature, the thermal flow meter is structured such that a flow rate measurement circuit package having a protrusion for measuring a gas temperature is formed through resin molding. An inlet port opened to the upstream side of the measurement target gas is formed, a protrusion is arranged inside the inlet port, an inlet port and an outlet port are formed in the front and rear covers along the protrusion, and the measurement target gas received from the inlet port flows along the protrusion. Since the measurement target gas subjected to the measurement flows along the protrusion, it is possible to reduce influence of the heat from other heat resources and improve measurement accuracy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.