Micromechanical device for electromagnetic radiation sensing
US9810581B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 27, 2015 |
| Grant date | Nov 7, 2017 |
| Priority date | — |
| Expiry date | Jul 27, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2005/106
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems, methods, and apparatus for providing an improved electromagnetic radiation sensing micromechanical device to be utilized in high pixel-density pixel sensor arrays. The device includes an improved design for improved and adjustable performance through simple geometric or fabrication means. Furthermore, the design of the device lends itself to simple micromechanical manufacturing procedures. Additionally, the manufacturing procedures include a method to enable high uniformity and high yield sensor arrays. Arrays of the device can be utilized as IR imaging detectors for use in applications such as human presence detection, nonvisual environment monitoring, security and safety, surveillance, energy monitoring, fire detection and people counting.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.