Patent · US Active

Sniffer leak detector with multi-stage membrane pump

US9810597B2 · kind B2 · utility

2Cited by

31References

8Claims

0Family size

Assignee

INFICON AG · LI

Inventors

Heike Hilgers · Bensberg, DE
Hjalmar Bruhns · Bonn, DE
Daniel Wetzig · Cologne, DE
Norbert Rolff · Horrem, DE

Key dates

Filing date	Sep 2, 2014
Grant date	Nov 7, 2017
Priority date	—
Expiry date	Nov 30, 2034

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF04D19/046
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A sniffer leak detector includes a mass spectrometer for analyzing hydrogen or helium, a turbomolecular pump which is connected with said mass spectrometer and whose outlet is connected with a prevacuum pump, and a sniffer probe which includes a plurality of intake lines and is connected with said inlet of said turbomolecular pump, wherein a vacuum pump includes at least three stages whose inlet stage defines said prevacuum pump and is connected with said outlet of said turbomolecular pump via a blocked throttle, wherein, between adjacent stages of said vacuum pump, an intermediate inlet each is provided, wherein each intermediate inlet is connected with a different intake line of said sniffer probe and at least one of the intake lines as a suction line is connected with said inlet of said turbomolecular pump for obtaining different gas flows.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.