Apparatus and method for driving and measuring a MEMS mirror system
US9810901B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 22, 2015 |
| Grant date | Nov 7, 2017 |
| Priority date | — |
| Expiry date | May 13, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/085
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to an apparatus for driving and measuring a MEMS mirror system, the MEMS mirror system having a mirror pivotable around an axis by a driving coil and exhibiting a resonance frequency, having a pulse generator and a measuring unit, each electrically connected to the coil. The pulse generator is preferably configured to feed a modulated pulse signal, comprised of pulses separated by intervals and having a modulation frequency different from the resonance frequency, to the coil. The measuring unit is preferably configured to measure a value of a signal output by the coil during an interval of the modulated pulse signal. In a further aspect of the invention a method is provided for driving and measuring the MEMS mirror system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.