Self-balancing position sensitive detector
US9812591B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 10, 2016 |
| Grant date | Nov 7, 2017 |
| Priority date | — |
| Expiry date | Jun 10, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2001/446
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A self-balancing optical position sensitive detector includes a pair of spaced apart, parallel, longitudinally extending doped regions on a first surface on a front side of a substrate 16 of opposite doping type with contact pads on the front side at respective ends of a first doped region of the pair. A voltage source applies a potential difference between the contact pads of the first doped region. On the front side, a contact pad of the second doped region of the pair provides an analog output signal representative of a longitudinal position of a center of gravity of an incident light pattern along the doped regions without external circuitry processing the output signal to obtain a readout of the longitudinal position. A resistive line may directly overly, abut and be in contact with at least a portion of the first doped region. A conductive line may directly overly, abut and be in contact with at least a portion of the second doped region. No backside contact or processing of the substrate is required or employed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.