Optical sensor and manufacturing method thereof
US9812597B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 11, 2015 |
| Grant date | Nov 7, 2017 |
| Priority date | — |
| Expiry date | Aug 11, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Some embodiments of the present disclosure provide an optical sensor. The optical sensor includes a semiconductive substrate. A light sensing region is on the semiconductive substrate. A waveguide region is configured to guide light from a wave insert portion through a waveguide portion and to a sample holding portion. The waveguide portion includes a first dielectric layer including a first refractive index. A second dielectric layer includes a second refractive index. The second refractive index is smaller than the first refractive index. A first interconnect portion is positioned in the waveguide portion, configured to transmit electrical signal from the light sensing region to an external circuit. The sample holding portion is over the light sensing region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.