Patent · US Active

Capacitive ultrasonic transducer

US9816854B2 · kind B2 · utility

2Cited by
5References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 19, 2012
Grant dateNov 14, 2017
Priority date
Expiry dateFeb 7, 2035

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2291/021
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A capacitive ultrasonic transducer includes a sensor head having a back plate, the structured front side of which is provided with an insulation layer, and the back side of which is provided with an electrode. In order to achieve an improved construction by means of which increased temperature resistance up to several hundred degrees Celsius can be achieved even in strongly oxidizing and reducing media, the membrane provided as a sound generator is subjected to tensile stress in a planar direction.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.