Capacitive ultrasonic transducer
US9816854B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 19, 2012 |
| Grant date | Nov 14, 2017 |
| Priority date | — |
| Expiry date | Feb 7, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/021
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive ultrasonic transducer includes a sensor head having a back plate, the structured front side of which is provided with an insulation layer, and the back side of which is provided with an electrode. In order to achieve an improved construction by means of which increased temperature resistance up to several hundred degrees Celsius can be achieved even in strongly oxidizing and reducing media, the membrane provided as a sound generator is subjected to tensile stress in a planar direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.