Magnetic field probe and probe head thereof

US9817080B2 · kind B2 · utility

Assignee

• National Taiwan University · TW

Inventors

• Yien-Tien Chou · Dashulong, TW
• Hsin-Chia Lu · Taipei, TW

Key dates

• Filing date: Jun 4, 2017
• Grant date: Nov 14, 2017
• Expiry date: Jun 4, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R33/0076
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A magnetic field probe and a probe head thereof are disclosed herein. The probe head includes an inner metal layer, a shielding unit, and a filtering unit. The inner metal layer receives a magnetic field to be measured. The shielding unit, including a first shielding metal layer and a second shielding metal layer, shields the inner metal layer. The first and the second shielding metal layer are respectively stacked above and below the inner metal layer. The filtering unit, including a first filtering metal layer and a second filtering metal layer, filters out an electric field interfering with the inner metal layer. The first filtering metal layer is stacked between the first shielding metal layer and the inner metal layer. The second filtering metal layer is stacked between the second shielding metal layer and the inner metal layer.