Sensor with magnetroesitive and/or thin film element abutting shorting bars and a method of manufacture thereof
US9817087B2 · kind B2 · utility
3Cited by
7References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 14, 2012 |
| Grant date | Nov 14, 2017 |
| Priority date | — |
| Expiry date | Nov 20, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49117
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of manufacture of a sensor, the method comprising, in a first fabrication facility, forming one or more components of the sensor on a substrate; and in a second fabrication facility depositing a sensor layer, such as a magnetoresistive sensor, onto the substrate or over the one or more components. Otherwise contaminating effects of depositing magnetoresistive materials can thus be confined to the second fabrication facility, permitting more advanced fabrication equipment and techniques to be employed in the first fabrication facility.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.