Tunable wavelength filter with embedded metal temperature sensor and its application to external-cavity type tunable wavelength laser
US9817190B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Oct 24, 2014 |
| Grant date | Nov 14, 2017 |
| Priority date | — |
| Expiry date | Dec 22, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/0612
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Provided are a tunable wavelength filter with an embedded metal temperature sensor and an external-cavity type tunable wavelength laser module. In detail, the tunable wavelength filter with an embedded metal temperature sensor and the external-cavity type tunable wavelength laser module achieve wavelength stability by forming a metal temperature sensor using a resistance change of a metal thin film according to temperature on a point on an isothermal layer having the same temperature distribution as the optical waveguide during a process for fabricating the optical waveguide with polymer to accurately measure a temperature of an optical waveguide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.