Arc lamp and substrate heating apparatus having the arc lamp
US9818596B2 · kind B2 · utility
0Cited by
8References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 8, 2016 |
| Grant date | Nov 14, 2017 |
| Priority date | — |
| Expiry date | Apr 8, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B7/18
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An arc lamp includes an arc tube configured to receive a reaction gas therein, and an anode and a cathode disposed opposite one another within the arc tube and configured to generate an electrical arc. The anode includes an anode head portion extending inwardly from an end portion of the arc tube, and an anode tip portion bonded to the anode head portion and comprising a trench extending in a top surface along a peripheral region of the anode tip portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.