Rotation-rate sensor having a substrate having a main extension plane for detecting a rotation rate

US9823073B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Thorsten Balslink · Kirchentellinsfurt, DE
• Rolf Scheben · Stuttgart, DE
• Benjamin Schmidt · Stuttgart, DE
• Ralf Ameling · Aalen, DE
• Mirko Hattass · Stuttgart, DE
• Burkhard Kuhlmann · Reutlingen, DE
• Robert Maul · Reutlingen, DE

Key dates

• Filing date: May 14, 2014
• Grant date: Nov 21, 2017
• Expiry date: Oct 14, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G01C19/5747
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A rotation-rate sensor having a substrate with main extension plane, for detecting a rotation rate, extending in a direction parallel/orthogonal to the main plane; the sensor including a primary/secondary pair of seismic masses; the primary pair having first/second primary masses; the secondary pair having first/second secondary masses; the first/second primary masses being movable relative to the substrate along a primary deflection direction extending parallel to the main plane; the first/second secondary masses being movable relative to the substrate along a secondary deflection direction extending parallel to the main plane; the first/second primary masses and the first/second primary masses being movable antiparallel or parallel to one another corresponding to the deflection direction, essentially extending orthogonally to the secondary deflection direction; and the primary pair and/or secondary pair being drivable so that, based on sensor rotation, the Coriolis force leads to deflection of the first/second primary masses and/or the first/second secondary masses.