Patent · US Active

Micro-electro-mechanical system drive-mode oscillator module and method therefor

US9823074B2 · kind B2 · utility

0Cited by

27References

17Claims

0Family size

Assignee

NXP USA, Inc. · US

Inventors

Hugues Beaulaton · Toulouse, FR
Laurent Cornibert · Toulouse, FR
Gerhard Trauth · Muret, FR

Key dates

Filing date	Aug 8, 2012
Grant date	Nov 21, 2017
Priority date	—
Expiry date	Sep 2, 2032

Classification

Technology area (CPC H)Electricity
CPC primaryH03B2200/0082
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A drive-mode oscillator module for use within a micro-electro-mechanical system (MEMS) device is described. The drive-mode oscillator module is arranged to receive a proof-mass measurement signal from a proof-mass of the MEMS device and to output a proof-mass actuation signal to the proof-mass of the MEMS device. The drive-mode oscillator module comprises a first, higher gain accuracy drive-mode component for generating an actuation signal to be output by the drive-mode oscillator module during an active mode of the MEMS device, and a second, lower power consumption drive-mode component for generating an actuation signal to be output by the drive-mode oscillator module during a standby mode of the MEMS device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.