Chemical device with thin conductive element
US9823217B2 · kind B2 · utility
3Cited by
294References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 3, 2016 |
| Grant date | Nov 21, 2017 |
| Priority date | — |
| Expiry date | Feb 3, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/4145
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In one implementation, a chemical device is described. The sensor includes a chemically-sensitive field effect transistor including a floating gate structure having a plurality of floating gate conductors electrically coupled to one another. A conductive element overlies and is in communication with an uppermost floating gate conductor in the plurality of floating gate conductors. The conductive element is wider and thinner than the uppermost floating gate conductor. A dielectric material defines an opening extending to an upper surface of the conductive element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.